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S22 Mecatrônica |
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Title:
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DESIGN OF A DIGITAL CONTROLLER FOR A SUBMICROMETRIC POSITIONING SYSTEM
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Summary :
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THIS PAPER CONCERNS A DIGITAL CONTROLLER DESIGN AND SIMULATION FOR POSITION CONTROL OF A SUB-MICROMETRIC SYSTEM OF HIGH DYNAMIC RESPONSE. THE SYSTEM IS ASSEMBLED ON A TABLE WITH FLEXURAL SPRING GUIDES DRIVEN BY A PIEZOELECTRIC ACTUATOR, AND WITH EXTENSOMETERS FOR LINEAR POSITION MEASUREMENT. THE DISCRETIZATION OF THE SUB-MICROMETRIC POSITIONING SYSTEM THROUGH THE PIEZOELECTRIC ACTUATOR, AND ITS MECHANICAL SUB-SYSTEM WAS SUCCESSFULLY PERFORMED. THE DYNAMIC RESPONSE OF THE PLANT WITH ZERO-ORDER HOLD WAS VERY GOOD, WITH AN OVERSHOOT OF LESS THAN 20%, SAME AS RESPONSE OF THE CONTINUOUS SYSTEM. THE DESIGN OF A PD DISCREET CONTROLLER RESULTED IN A EVEN BETTER DYNAMIC PERFORMANCE, WITH RISE AND SETTLING TIMES LESS THAN THOSE OBTAINED WITH THE DISCRETIZATION OF THE CONTINUOUS SYSTEM.
KEY WORDS: DIGITAL CONTROLLER, SUBMICROMETRIC POSITIONING, DISCRETIZATION, PIEZOELECTRIC ACTUATOR, PD CONTROLLER.
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Author :
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Martin, Carlos Alberto 0
Tavares, Ricardo Compiani
Weingaertner, Walter Lindolfo
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Paper View :
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